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Microelectromechanical systems
Results: 938

#	Item
341	. THEME ARTICLE Computational Methods for Design and Control of MEMS Add to Reading List Source URL: www.ee.washington.edu Language: English - Date: 2003-07-05 00:47:00 Technology Transducers Electromagnetism Nanotechnology Electrical engineering Microelectromechanical systems Vector Micromachinery Microtechnology Materials science Actuators
342	Microsoft Word[removed]doc Add to Reading List Source URL: www.ee.washington.edu Language: English - Date: 2005-10-31 22:14:16 Inorganic solvents Oxides Nanotechnology Semiconductor device fabrication RF MEMS Properties of water Microelectromechanical systems Self-assembled monolayer Photolithography Chemistry Materials science Microtechnology
343	MEMS Fixtures for Handling and Assembly of Microparts Isam N. Tahhan 1,* 1 Yan Zhuang 2 Add to Reading List Source URL: www.ee.washington.edu Language: English - Date: 2003-07-05 01:32:00 Semiconductor device fabrication Nanotechnology Mechanical engineering Microelectromechanical systems Transducers Microfabrication Etching CMOS Integrated circuit Microtechnology Materials science Technology
344	Microsoft Word - MEMS2005 Paper-4SL1K1S2-kb.doc Add to Reading List Source URL: www.ee.washington.edu Language: English - Date: 2004-11-01 01:47:51 Nanotechnology Introductory physics Self-organization Forms of energy Mechanical engineering Microelectromechanical systems Loudspeaker Kinetic energy Self-assembled monolayer Physics Energy Technology
345	INSTITUTE OF PHYSICS PUBLISHING JOURNAL OF MICROMECHANICS AND MICROENGINEERING J. Micromech. Microeng[removed]S91–S95 Add to Reading List Source URL: www.ee.washington.edu Language: English - Date: 2003-07-02 16:59:00 Technology Chemistry Deep reactive-ion etching Microelectromechanical systems Microfabrication Black silicon Etching Wafer Polyimide Materials science Semiconductor device fabrication Microtechnology
346	Algorithmic MEMS University of California at Berkeley, Berkeley, CA[removed]Dartmouth College, Hanover, NH[removed]Karl Friedrich B ohringer, Add to Reading List Source URL: www.ee.washington.edu Language: English - Date: 2003-07-05 01:47:00 Nanotechnology Mechanical engineering Microelectromechanical systems Transducers Electromagnetism Micromachinery Robotics Physics Microtechnology Actuators Technology
347	PART SCALING AND MECHANICS OF THIN PART SELF-ASSEMBLY IN THE FLUIDIC PHASE Add to Reading List Source URL: www.ee.washington.edu Language: English - Date: 2010-12-14 21:14:14 Materials science Surface chemistry Microtechnology Fluid dynamics Surface tension Meniscus Contact angle Self-assembled monolayer Microelectromechanical systems Fluid mechanics Physics Chemistry
348	JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 15, NO. 4, AUGUST[removed]Self-Assembly of PZT Actuators for Micropumps With High Process Repeatability Add to Reading List Source URL: www.ee.washington.edu Language: English - Date: 2006-11-13 22:11:03 Transducers Actuators Microtechnology Computer printers Lead zirconate titanate Piezoelectricity Adhesive Adhesion Microelectromechanical systems Chemistry Technology Electromagnetism
349	Microsoft Word - MEMS05_Fang.doc Add to Reading List Source URL: www.ee.washington.edu Language: English - Date: 2004-10-27 21:09:24 Microtechnology Silicon Microelectromechanical systems Wafer Flip chip Hydrophobe Thermal oxidation Three-dimensional integrated circuit Properties of water Chemistry Semiconductor device fabrication Materials science
350	JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 8, NO. 4, DECEMBER[removed]CMOS Integrated Ciliary Actuator Array as a General-Purpose Micromanipulation Add to Reading List Source URL: www.ee.washington.edu Language: English - Date: 2003-07-04 23:58:00 Electromagnetism Actuators Nanotechnology Integrated circuits Semiconductor device fabrication Microelectromechanical systems Valve actuator Micromachinery CMOS Microtechnology Materials science Technology

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